Specific Process Knowledge/Etch: Difference between revisions
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**Before the lecture please watch the following video: "Introduction to Dry Etch Equipment". You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT | **Before the lecture please watch the following video: "Introduction to Dry Etch Equipment". You can find it on the cleanroom drive: U:\DCH\CleanroomDrive\_TPT | ||
**Lecture slide show [[Media:TPT Dry etching 20170223.pptx]] | **Lecture slide show [[Media:TPT Dry etching 20170223.pptx]] | ||
**Lecture slides with explanatory text included [[Media:TPT Dry etching | **Lecture slides with explanatory text included [[Media:TPT Dry etching with notes 20170223.pdf]] | ||
* For more information take a look at the Danchip homepage: [http://www.danchip.dtu.dk/english/User-information/Courses/The-dry-etch-tool-package-training-TPT- Dry Etch TPT] | * For more information take a look at the Danchip homepage: [http://www.danchip.dtu.dk/english/User-information/Courses/The-dry-etch-tool-package-training-TPT- Dry Etch TPT] | ||