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Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions

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Jml (talk | contribs)
Bureaucrats, danchip, Administrators
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Jml (talk | contribs)
Bureaucrats, danchip, Administrators
1,918 edits
Line 95: Line 95:
|+'''The STAMP recipe'''
|+'''The STAMP recipe'''
|-
|-
|rowspan="3" align="center"|
|rowspan="3" align="center"| Initial RF clean
! rowspan="3" align="center"| O<sub>2</sub> plasma
! rowspan="3" align="center"| O<sub>2</sub> plasma
! Flow
! Flow
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