Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
| Line 37: | Line 37: | ||
== The FLAT recipe == | == The FLAT recipe == | ||
The FLAT recipe is designed for coating of non-structured wafers. The amount of FDTS is delivered in one cycle (4 injections | The FLAT recipe is designed for coating of non-structured wafers. The amount of FDTS is delivered in one cycle (4 injections of FDTS at 0.400 Torr + 1 injection of water at 18 Torr) and the reaction time is 15 minutes. | ||
{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|+'''The FLAT recipe''' | |+'''The FLAT recipe''' | ||
| Line 86: | Line 86: | ||
|- | |- | ||
|} | |} | ||
== The STAMP recipe == | == The STAMP recipe == | ||