Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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The FLAT recipe is designed for coating of non-structured wafers. The amount of FDTS is delivered in one cycle (4 injections pf FDTS at 0.400 Torr + 1 injection of water at 18 Torr) and the reaction time is 15 minutes. | The FLAT recipe is designed for coating of non-structured wafers. The amount of FDTS is delivered in one cycle (4 injections pf FDTS at 0.400 Torr + 1 injection of water at 18 Torr) and the reaction time is 15 minutes. | ||
{| border="2" cellpadding="2" cellspacing="1" | {| border="2" cellpadding="2" cellspacing="1" | ||
|+'''The | |+'''The FLAT recipe''' | ||
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! rowspan="3" align="center"| O<sub>2</sub> plasma | ! rowspan="3" align="center"| O<sub>2</sub> plasma | ||