Specific Process Knowledge/Etch/Etching of Silicon/Si etch using ASE: Difference between revisions
New page: ==The Bosch process: Etching of silicon== The Bosch process uses alternation between an etch cycle and a passivation cycle. Introducing a passivation step in an etch process is very benef... |
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|+ The shallolr recipe | |+ '''The shallolr recipe''' | ||
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! colspan="2" align="center"| Common parameters | ! colspan="2" align="center"| Common parameters | ||