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Specific Process Knowledge/Thin film deposition/Deposition of Gold: Difference between revisions

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! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]])
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Wordentec|Wordentec]])
! Sputter ([[Specific Process Knowledge/Thin film deposition/Lesker|Lesker]])
! Sputter ([[Specific Process Knowledge/Thin film deposition/Lesker|Lesker]])
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Physimeca|Physimeca]])
! E-beam evaporation ([[Specific Process Knowledge/Thin film deposition/Physimeca|Physimeca]])
! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#The_Hummer_Sputter_coater|Hummer]] 
! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#Sputter coater 03|(Sputter coater 03)]]
! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#The_Balzer_Sputter_coater|Balzer]]
! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#Sputter coater 04|(Sputter coater 04)]]
! Sputter coater [[Specific Process Knowledge/Thin film deposition/Sputter coater#The_Balzer_Sputter_coater|Sputter coater 03]]
|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
! General description
! General description
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| Sputter deposition of Au
| Sputter deposition of Au
| E-beam deposition of Au
| E-beam deposition of Au
| Sputter deposition of Au
| Sputter deposition of Au
| Sputter deposition of Au
| Sputter deposition of Au
| Sputter deposition of Au
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|RF Ar clean
|RF Ar clean
|RF Ar clean
|RF Ar clean
|


|
|
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|
|
|
|
|Not measured
 
|-
|-
|-style="background:LightGrey; color:black"
|-style="background:LightGrey; color:black"
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|Not measured
|Not measured
|Not measured
|Not measured
|Not measured
 
|-
|-


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*Several smaller pieces  
*Several smaller pieces  
|
|
*Several smaller samples
*1x4" wafer
*1x4" wafer
*Several smaller samples
|
|
*1 large sample (< 4" wafer)
*Several smaller samples
*Several smaller samples
|
*1x4" wafer
*1x4" wafer
*Several smaller samples
 
|-
|-


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* Pyrex wafers
* Pyrex wafers
|
|
* All samples allowed in the SEM Supra 1
|
|
|
* All samples allowed in the SEM Supra 2 or 3
* All samples allowed in the SEM Supra 1
|.
|.
 


|-style="background:WhiteSmoke; color:black"
|-style="background:WhiteSmoke; color:black"
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|
|


|Used for gold sputter coating of
|
samples before SEM inspection
* Used for gold sputter coating of samples before SEM inspection
|Used for gold sputter coating of
|
samples before SEM inspection
* Used for gold sputter coating of samples before SEM inspection
|Used for gold sputter coating of  
samples before SEM inspection
|-
|-
|}
|}
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