Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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# '''A pressure gradient''' The vapor pressure of the chemical (when stored at some temperature in the cylinder) compared to the pressure in the chamber. | # '''A pressure gradient''' The vapor pressure of the chemical (when stored at some temperature in the cylinder) compared to the pressure in the chamber. | ||
#'''A temperature gradient''' The chemical and the line that feeds the process chamber are kept at a higher temperature. | #'''A temperature gradient''' The chemical and the line that feeds the process chamber are kept at a higher temperature. | ||
It is critical that the chemicals with the lowest vapor pressure are injected first into the process chamber. | |||
== The FLAT recipe == | == The FLAT recipe == | ||