Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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; Water content | ; Water content | ||
: Water will cause the chemicals to polymerize (bond to each other instead of on the surface) and it is therefore critical to precisely control the water content. | : Water will cause the chemicals to polymerize (bond to each other instead of on the surface) and it is therefore critical to precisely control the water content. | ||
; Substrate temperature | |||
: The temperature of the substrate is the same as the process chamber and it is kept constant at 35 O<sup>o</sup>C. | |||
; Chemical composition | |||
: The composition of chemicals. | |||
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