Specific Process Knowledge/Thin film deposition/Deposition of AZO: Difference between revisions
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! | ! Sputtering deposition ([[Specific Process Knowledge/Thin film deposition/Lesker|Lesker]]) | ||
! Atomic layer deposition ([[Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200|ALD Picosun R200]]) | ! Atomic layer deposition ([[Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200|ALD Picosun R200]]) | ||
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