Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions
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The most important parameters to control during the MVD process are: | The most important parameters to control during the MVD process are: | ||
; Substrate surface | |||
: A O<sub>2</sub> plasma is run prior to any process in order to | |||
condition the substrate surface. This will also remove any existing MVD coating. | |||
; Water content | |||
: Water will cause the chemicals to polymerize (bond to each other instead of on the surface) and it is therefore critical to precisely control the water content. | |||
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