Specific Process Knowledge/Lithography: Difference between revisions

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 '''Before the "questions and exercises" session'''
-* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus, see link below)
+* Read Sami Franssila "Introduction to Microfabrication" (2010), Chapter 9: Optical Lithography. (Available online from DTU campus)
-* Watch the lecture videos (7 videos, 2:41 hours in total). A link to the lecture videos can be found below.
+* Watch the lecture videos (7 videos, 2:41 hours in total).
 '''Before training session'''
-* Watch the training videos of spin coating (automatic), exposure (operation and alignment), and development (automatic). The training videos can be found below.
+* Watch the training videos of spin coating (automatic), exposure (operation, and alignment), and development (automatic).
 * Study the equipment manuals. The manuals are available in LabManager.
-* Study the TPT process flows (first print and alignment). The process flows can be found below.
+* Study the TPT process flows (first print, and alignment).
+'''Links to literature, lecture videos, training videos, equipment manuals, and process flows can be found in the "Knowledge and information" section below.
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