Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
| Line 190: | Line 190: | ||
* Variable at Low vacuum (0.1 mbar-2 mbar) | * Variable at Low vacuum (0.1 mbar-2 mbar) | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* Conductor: 5 Pa | * Conductor vacuum mode: 5 Pa | ||
* Standard: 30 Pa | * Standard vacuum mode: 30 Pa | ||
* Charge-up reduction: 50 Pa | * Charge-up reduction vacuum mode: 50 Pa | ||
<!--|style="background:WhiteSmoke; color:black"| | <!--|style="background:WhiteSmoke; color:black"| | ||
* High vacuum and Low vacuum--> | * High vacuum and Low vacuum--> | ||