Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions
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* Variable at Low vacuum (0.1 mbar-2 mbar) | * Variable at Low vacuum (0.1 mbar-2 mbar) | ||
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* Conductor: 5 Pa | |||
* Standard: 30 Pa | |||
* Charge-up reduction: 50 Pa | |||
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* High vacuum and Low vacuum--> | * High vacuum and Low vacuum--> | ||