Jump to content

Specific Process Knowledge/Characterization/SEM Tabletop 1: Difference between revisions

← Older editNewer edit →
VisualWikitext
Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,329 edits
No edit summary
Pevo (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
2,329 edits
No edit summary
Line 4: Line 4:
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=
=<span style="background:#FF2800">THIS PAGE IS UNDER CONSTRUCTION</span>[[image:Under_construction.png|200px]]=


[[image:LA_SEM_Supra_1.jpg|400x400px|right|thumb|The SEM Supra 1 located in basement 346-907]]
[[image:Tabletop SEM.jpg|400x400px|right|thumb|SEM Tabletop 1 located in basement 346-904]]


=SEM Supra 1=
=SEM Supra 1=


The SEM Supra 1 a scanning electron microscope. It produces enlarged images of a variety of specimens, achieving magnifications of over 500.000x providing ultra high resolution imaging. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.
The SEM Tabletop 1 Is a scanning electron microscope. It produces enlarged images of a variety of specimens. This important and widely used analytical tool provides exceptional resolution and depth of field and requires minimal specimen preparation.


The SEM is a VP (variable pressure) instrument - Indicating that it is capable of operating at variable pressure. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Also, the Se2 and InLens detectors will no longer work.
The SEM is very fast and easy to use. Sample loading can be done fast and easy. It is not needed to perform much optimization in order to obtain good SEM images.
 
However, it has a limited resolution compared to the other SEMs at Danchip, but for inspection of samples with structures in the micrometer range it is very fast and easy to use.
 
Many sample materials are allowed in the this SEM, including all standard cleanroom materials and some biological samples
 
The stage can be moved manually in the X and Y directions by turning two knobs in the
 
The SEM can be operated in different pressure modes: Conductor, standard and charge-up reduction. By increasing the pressure in the chamber it is possible to image isolating samples. The higher density of gas molecules will eliminate the charges at the cost of slightly reduced resolution. Thus the charge-up reduction mode makes it possible to obtain SEM images of most samples including non-conducting samples without much sample preparation.
 
The SEM is equipped with two detectors: A secondary electron (SE) detector and a backscatter (BSE) detector.


The SEM is the training SEM at DTU Danchip. It means that all new SEM users with no or little SEM experience must be trained on this tool and gain basic knowledge here before being qualified for training on other SEM's.
The SEM is the training SEM at DTU Danchip. It means that all new SEM users with no or little SEM experience must be trained on this tool and gain basic knowledge here before being qualified for training on other SEM's.


The SEM Supra 1 was installed in the cleanroom in November 2010, but it has now been relocated in the basement outside the cleanroom, so that users can avoid to clean samples that have been outside the cleanroom before SEM inspection.  
The SEM Tabletop 1 was installed at Danchip in January 2017.
 
cleanroom before SEM inspection.  


The Balzer Sputter is located in the same room as the SEM Supra 1 and can be used to cover samples (for instance polymer samples from  the Polymer Injection Molding tool) with a thin gold layer before SEM inspection to avoid charging problems.  
The Balzer Sputter is located in the same room as the SEM Supra 1 and can be used to cover samples (for instance polymer samples from  the Polymer Injection Molding tool) with a thin gold layer before SEM inspection to avoid charging problems.  
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Characterization/SEM_Tabletop_1"