Specific Process Knowledge/Characterization/SEM: Scanning Electron Microscopy: Difference between revisions

At Danchip there are five SEMs (scanning electron microscopes) that all cover a wide range of needs both in the cleanroom and outside: From the fast in-process verification of different process parameters such as etch rates, step coverages or lift-off quality to the ultra high resolution images on any type of sample intended for publication.  

* The SEM Supra 1 is located in the basement outside the cleanroom, where it is serving two purposes: Serving the users that have samples from outside the cleanroom and serving as training tool; all new SEM users with no/little SEM experience must be trained on this tool and gain basic knowledge (typically 10 hours of usage) here before being qualified for training on other SEM's.

* The SEM 2 and 3 are located in the cleanroom where they are being used for inspection of sample that have been fabricated in the cleanroom. Furthermore, SEM Supra is equipped with an EDX detector for analysis of the furnace materials

* The Leo SEM is a very reliable and rugged instrument that provides high quality images of most samples. It is exclusively dedicated to the users of the Raith E-beam lithography system so general imaging of user samples is not allowed.  

* The SEM Tabletop 1 is a tabletop SEM that is located in the basement outside the cleanroom. It is fast and easy to use, also for non-conducting samples.  

The two remaining SEM's at Danchip (called SEM Supra 2 and SEM Supra 3) serve as general imaging tools in the cleanroom. Like Supra 1, they are VP models from Carl Zeiss and will produce excellent images on any sample. The possibility of operating at higher chamber pressures in the VP mode makes imaging of bulk non-conducting samples possible. The SEM Supra 2 is also equipped with an airlock and an EDX detector.

All four SEMs all manufactured by Carl Zeiss and have the same graphical user interface and very identical electron optics. But there are there are small hardware and software differences, thus a training is needed for each SEM you want to use.

 

Three SEMs are located in the cleanroom (SEM Supra 2, SEM Supra 3 and SEM LEO), and one SEM is located in the basement (SEM Supra 1).