Specific Process Knowledge/Etch/ICP Metal Etcher/silicon oxide: Difference between revisions
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|SEM profile images | |SEM profile images | ||
|[[File:ICP metal s007592_21.jpg|200px]] [[File:ICP metal s007592_24.jpg|200px]]<br> ''by bghe@danchip (2015-06-02)'' | |[[File:ICP metal s007592_21.jpg|200px]] [[File:ICP metal s007592_24.jpg|200px]]<br> ''by bghe@danchip (2015-06-02)'' | ||
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|Etch rate in barc | |Etch rate in barc | ||