Specific Process Knowledge/Thin film deposition/MVD: Difference between revisions

@@ Line 48: / Line 48: @@
 | 900 seconds
 |-
-! Temperature
+! Purge
-| 10<sup>o</sup>C
+! Cycles
-! SF<sub>6</sub> Flow
+| 5
 | 260 sccm
 | 0 sccm
 |-
-! No. of cycles
-| 31
-! O<sub>2</sub> Flow
-| 26 sccm
-| 0 sccm
 |}