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Specific Process Knowledge/Thermal Process/A1 Bor Drive-in furnace: Difference between revisions

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Mdyma (talk | contribs)
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*Dry
*Dry
*Wet: with torch (H<sub>2</sub>+O<sub>2</sub>)
*Wet: with torch (H<sub>2</sub>+O<sub>2</sub>)
*dope with Boron source wafer
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!style="background:silver; color:black" align="center"|Performance
!style="background:silver; color:black" align="center"|Performance