Specific Process Knowledge/Imprinting: Difference between revisions
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*MVD - ''Molecular Vapor Deposition - Antistiction coater for silicon stamps'' | *MVD - ''Molecular Vapor Deposition - Antistiction coater for silicon stamps'' | ||
*Drop Shape Analyzer - ''Tool to measure the hydrophobicity of the antistiction layer'' | *Drop Shape Analyzer - ''Tool to measure the hydrophobicity of the antistiction layer'' | ||
*[[/EVG NIL|EVG NIL]] - ''Aligner and imprinting tool'' | *[[/EVG NIL|EVG NIL]] - ''Aligner and imprinting tool'' | ||
Revision as of 10:37, 28 March 2008
Choose an equipment
- MVD - Molecular Vapor Deposition - Antistiction coater for silicon stamps
- Drop Shape Analyzer - Tool to measure the hydrophobicity of the antistiction layer
- EVG NIL - Aligner and imprinting tool