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Specific Process Knowledge/Thin film deposition/ALD2 (PEALD): Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers
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*[[/Standard recipes on the ALD2 tool|Standard recipes on the ALD2 tool]]
*[[/Standard recipes on the ALD2 tool|Standard recipes on the ALD2 tool]]
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/ALD_multilayers Advanced recipes involving fabrication of multilayers done on '''ALD1''']]
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/Al2O3_deposition_using_ALD2 Al<sub>2</sub>O<sub>3</sub> deposition using '''ALD2''']
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/Al2O3_deposition_using_ALD Al<sub>2</sub>O<sub>3</sub> deposition using '''ALD1''']
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/TiO2_deposition_using_ALD2 TiO<sub>2</sub> deposition using '''ALD2''']
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/TiO2_deposition_using_ALD TiO<sub>2</sub> deposition using '''ALD1''']
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/TiO2_deposition_using_ALD2 HfO<sub>2</sub> deposition using '''ALD2''']
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/TiO2_deposition_using_ALD2 SiO<sub>2</sub> deposition using '''ALD2''']
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/TiO2_deposition_using_ALD2 AlN deposition using '''ALD2''']
*[http://labadviser.danchip.dtu.dk/index.php/Specific_Process_Knowledge/Thin_film_deposition/ALD_Picosun_R200/TiO2_deposition_using_ALD2 TiN deposition using '''ALD2''']


==Equipment performance and process related parameters==
==Equipment performance and process related parameters==
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