Specific Process Knowledge/Thin film deposition: Difference between revisions
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*[[/Alcatel|Alcatel]] - ''E-beam evaporator and sputter tool'' | *[[/Alcatel|Alcatel]] - ''E-beam evaporator and sputter tool'' | ||
*[[/Lesker|Lesker]] - ''Sputter tool'' | *[[/Lesker|Lesker]] - ''Sputter tool'' | ||
*[[/Multisource_PVD|PVD co-sputter/evaporation]] - <span style="color:Red"> ( | *[[/Multisource_PVD|PVD co-sputter/evaporation]] - <span style="color:Red"> (Decommissioned</span>) ''E-beam evaporator and multiple wafer tool'' | ||
*[[/Wordentec|Wordentec]] - ''E-beam evaporator, sputter and thermal evaporator'' | *[[/Wordentec|Wordentec]] - ''E-beam evaporator, sputter and thermal evaporator'' | ||
*[[/Physimeca|Physimeca]] - ''E-beam evaporator (III-V lab)'' | *[[/Physimeca|Physimeca]] - ''E-beam evaporator (III-V lab)'' | ||