Specific Process Knowledge/Wafer cleaning/IMEC: Difference between revisions
| Line 33: | Line 33: | ||
|Rinse | |Rinse | ||
|2 min. rinse | |2 min. rinse | ||
| | |. | ||
|Put into dedicated wet box for IMEC | |Put into dedicated wet box for IMEC | ||
|- | |- | ||
| Line 33: | Line 33: | ||
|Rinse | |Rinse | ||
|2 min. rinse | |2 min. rinse | ||
| | |. | ||
|Put into dedicated wet box for IMEC | |Put into dedicated wet box for IMEC | ||
|- | |- | ||