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Specific Process Knowledge/Lithography/Baking: Difference between revisions

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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,915 edits
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'''Spincoater: Gamma UV:'''
'''Spincoater: Gamma UV:'''
* TM16 @ 110°C: Mean temp 110.1°C, uniformity error 0.23%.
 
* TM15 @ 100°C: Mean temp 99.5°C, uniformity error 0.95%.
* TM16 @ 110°C: Mean 110.1°C, uniformity error 0.23%.
* TM14 @ 90°C: Mean temp 88.9°C, uniformity error 1.01%.
* TM15 @ 100°C: Mean 99.5°C, uniformity error 0.95%.
* TM13 @ 110°C: Mean temp 108.6°C, uniformity error 1.45%.
* TM14 @ 90°C: Mean 88.9°C, uniformity error 1.01%.
* TM13 @ 110°C: Mean 108.6°C, uniformity error 1.45%.
 


'''Developer: TMAH UV-lithography:'''
'''Developer: TMAH UV-lithography:'''
Coming soon.
Coming soon.


'''Spincoater: Süss stepper:'''
'''Spincoater: Süss stepper:'''
Coming soon.
Coming soon.


'''Developer: Stepper:'''
'''Developer: Stepper:'''
Coming soon.
Coming soon.


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