Specific Process Knowledge/Lithography/Baking: Difference between revisions
| Line 157: | Line 157: | ||
Comming soon. | Comming soon. | ||
| | | | ||
Spincoater: Gamma UV: | |||
* TM16 @ 110°C: Mean temp 110.1°C, uniformity error 0.23%. | |||
* TM15 @ 100°C: Mean temp 99.5°C, uniformity error 0.95%. | |||
* TM14 @ 90°C: Mean temp 88.9°C, uniformity error 1.01%. | |||
* TM13 @ 110°C: Mean temp 108.6°C, uniformity error 1.45%. | |||
Developer: TMAH UV-lithography: | |||
Coming soon. | |||
Spincoater: Süss stepper: | |||
Coming soon. | |||
Developer: Stepper: | |||
Coming soon. | |||
| | | | ||
Comming soon. | Comming soon. | ||