Specific Process Knowledge/Lithography/Coaters/SprayCoater: Difference between revisions
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*Spraying imprint | *Spraying imprint resists (primarily mr-NIL 6000E and mr-I 8000E series have been tested so far) | ||
*Spraying photoresist | *Spraying photoresist (primarily AZ4562, AZ4999 and AR-N 7520 have been tested so far) | ||
*Spraying of other solutions | *Spraying of other solutions | ||
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