Specific Process Knowledge/Lithography/Coaters: Difference between revisions
| Line 87: | Line 87: | ||
* Single substrate | * Single substrate | ||
* Edge handling chuck | * Edge handling chuck | ||
|style="background:WhiteSmoke; color:black"|Single substrate | |style="background:WhiteSmoke; color:black"| | ||
*Single substrate | |||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* Can handle almost any sample size and shape | * Can handle almost any sample size and shape | ||