Specific Process Knowledge/Lithography/Coaters: Difference between revisions
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* Single substrate | * Single substrate | ||
* Non-vacuum chuck for fragile substrates | * Non-vacuum chuck for fragile substrates | ||
|style="background:WhiteSmoke; color:black"| | |colspan="2" align="center" style="background:WhiteSmoke; color:black"| | ||
* Single substrate | * Single substrate | ||
* Edge handling chuck | * Edge handling chuck | ||
| | |style="background:WhiteSmoke; color:black"|Single substrate | ||
|style="background:WhiteSmoke; color:black"| | |style="background:WhiteSmoke; color:black"| | ||
* Can handle almost any sample size and shape | * Can handle almost any sample size and shape | ||