Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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* Boron Glass: 94.5° | * Boron Glass: 94.5° | ||
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* Si (native oxide): 77.8° | |||
* SiO<sub>2</sub> (110 nm): 81.7° | |||
* Si (native oxide): | * Boron Glass: 97.6° | ||
* SiO<sub>2</sub> (110 nm): | |||
* Boron Glass: | |||
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Track 1 | Track 1 [Track 2]: | ||
* Si (native oxide): 74.9° | * Si (native oxide): 74.9° [73.3°] | ||
* SiO<sub>2</sub> (110 nm): 81.8° | * SiO<sub>2</sub> (110 nm): 81.8° [73.4°] | ||
* Boron Glass: 85.4° | * Boron Glass: 85.4° [84.4°] | ||
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