Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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==Spin track 1 + 2== | ==Spin track 1 + 2== | ||
[[Image:HMDS spintrack.jpg|300x300px|thumb|HMDS module in | [[Image:HMDS spintrack.jpg|300x300px|thumb|HMDS module in spin track 1 + 2 in C-1.]] | ||
'''The user manual, user APV, and contact information can be found in LabManager:''' | '''The user manual, user APV, and contact information can be found in LabManager:''' | ||
[http://labmanager.dtu.dk/function.php?module=Machine&view=view& | [http://labmanager.dtu.dk/function.php?module=Machine&view=view&page_id=169 Spin track 1 + 2] | ||
<br clear="all" /> | <br clear="all" /> | ||