Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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*Recipe 1: baseline prime process with 5 min HMDS priming time | *Recipe 1: baseline prime process with 5 min HMDS priming time | ||
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==Spin track 1 + 2== | |||
[[Image:HMDS gammaUV.jpg|300x300px|thumb|HMDS module in gamma UV spincoater in E-5.]] | |||
'''The user manual, user APV, and contact information can be found in LabManager:''' | |||
[http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=359 Spincoater: Gamma UV] | |||
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