Specific Process Knowledge/Lithography/Baking: Difference between revisions
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!Purpose | !Purpose | ||
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Programmable contact bake | Programmable, contact bake | ||
*Soft bake | *Soft bake | ||
*PEB | *PEB | ||
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*PEB of SU-8 | *PEB of SU-8 | ||
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Adjustable temperature contact bake | Adjustable temperature, contact bake | ||
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Recipe dependent temperature contact or proximity bake | Recipe dependent temperature, contact or proximity bake | ||
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Manual convection bake | Manual convection bake | ||