Specific Process Knowledge/Lithography/Pretreatment: Difference between revisions
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==Spincoater: gamma UV== | ==Spincoater: gamma UV== | ||
[[Image: | [[Image:HMDS gammaUV.jpg|300x300px|thumb|HMDS module in gamma UV spincoater in E-5.]] | ||
'''The user manual, user APV, and contact information can be found in LabManager:''' | '''The user manual, user APV, and contact information can be found in LabManager:''' | ||
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=Buffered HF-Clean= | =Buffered HF-Clean= | ||