Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
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*<nowiki>#</nowiki>1 150mm wafer (only when set up for 150mm) | *<nowiki>#</nowiki>1 150mm wafer (only when set up for 150mm) | ||
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* | *Up to 20cm in diameter | ||
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*As many small samples as can be fitted on a 100mm wafer | *As many small samples as can be fitted on a 100mm wafer | ||