Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
| Line 179: | Line 179: | ||
*Quartz/fused silica | *Quartz/fused silica | ||
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*[http://labmanager.dtu.dk/function.php?module=XcMachineaction&view=edit&MachID=267 Please take a look in the cross contamination sheet in LabManager for details] | |||
*Silicon | *Silicon | ||
*Silicon oxides | *Silicon oxides | ||