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Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300/IBSD of Si: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, Bureaucrats, Administrators
7,318 edits
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{| border="2" cellspacing="1" cellpadding="3" align="left"
{| border="2" cellspacing="1" cellpadding="3" align="left"
!
!
!Recipe 1
!Recipe 1 - with the old (large) grids)
|-
|-
|Platen angle
|Platen angle
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<br clear="all" />
<br clear="all" />


===Results===
===Results with recipe 1 and the old (large) grids===


{| border="2" cellspacing="1" cellpadding="3" align="left"
{| border="2" cellspacing="1" cellpadding="3" align="left"
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