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Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions

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<pre>
<pre>
auto calib file    calibrations
auto calib file    calibrations
NO ALIGNMENT
  DRF5M             INITIAL: HEIMAP, CURRNT, DRIFT
  DRF5M             INITIAL: HEIMAP, CURRNT, DRIFT
                     CYCLIC: CURRNT, DRIFT (every 5 minutes without interupting the writing of a field)
                     CYCLIC: CURRNT, DRIFT (every 5 minutes without interupting the writing of a field)
  FT01             INITIAL: CURRNT, DRIFT
  MASK01             INITIAL: HEIMAP, CURRENT, INITBE, PDEFBE, SUBDEFBE
                     CYCLIC: CURRNT, DRIFT (every 5 minutes without interupting the writing of a field)
                     CYCLIC: CURRNT, DRIFT (every 5 minutes without interupting the writing of a field)
  DTU5M             INITIAL: HEIMAP,CURRNT,INITBE,PDEFBE,SUBDEFBE
   
                     CYCLIC: CURRNT, DRIFT (every 5 minutes without interupting the writing of a field)
ALIGNMENT
  HEI             INITIAL: HEIMAP
CUR5M             INITIAL: CURRNT
                     CYCLIC: CURRNT (every 10 minutes)
                     CYCLIC: CURRNT (every 5 minutes without interupting the writing of a field)
  DIRE01     INITIAL: PDEFBE, SUBDEFBE, CURRENT
                     CYCLIC: CURRNT (every 5 minutes without interupting the writing of a field)


</pre>
</pre>
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