Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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If the program can not detect your chip marks, change the scan conditions ('RG mark detection condition') and try again. | If the program can not detect your chip marks, change the scan conditions ('RG mark detection condition') and try again. | ||
= Double current exposure = | |||
<span style="font-size: 90%; text-align: right;">[[Specific_Process_Knowledge/Lithography/EBeamLithography/FilePreparation#top|Go to top of this page]]</span> | |||
Before running a double-current exposure, you should receive training from a person from the e-beam staff. If this procedure is not performed correctly, it might end up in large pattern shifts. | |||
A double-current exposure requires calibration of 2 condition files, of which you should calibrate the large current first and the small current afterwards. If the two patterns are aligned to each other, one should make sure the two condition files scan the same drift mark. The procedure is as follows: | |||
# Load, restore and calibrate the condition file with the large current. When you scan the drift mark (using DRIFT), note the position of the drift mark (the position is written in the result display area of the calibration window). | |||
# Increase the scan width in DRIFT to 40 µm in both X and Y. Save and execute DRIFT again. | |||
# Save the condition file as usual. | |||
# Load, restore and calibrate the condition file with the smallest current. When you scan the drift mark, make sure it scans the same mark as on the former condition file, i.e. that the two positions are equal within a few µm. If they are not, call a person from the e-beam team for help. | |||
# Save the condition file as usual. | |||
When you start the exposure, you call the condition file with the small current first. When the condition file with the large current is called, the state of the machine is restored to the condition file by the command 'RESTOR 1' in the sdf-file: | |||
<pre> | |||
_____________________________________________________________ | |||
MAGAZIN 'DOUBLE' | |||
#4 | |||
%4A | |||
JDF 'smallcurrent',1 | |||
ACC 100 | |||
CALPRM '0.2na_ap5' | |||
DEFMODE 2 | |||
RESIST 240 | |||
SHOT A,8 | |||
OFFSET(0,0) | |||
#4 | |||
%4A | |||
JDF 'largecurrent',1 | |||
ACC 100 | |||
CALPRM '10na_ap6' | |||
DEFMODE 2 | |||
RESTOR 1 Coloumn is restored to 10na_ap6 and lenses are demagnetized | |||
RESIST 240 | |||
SHOT A,18 | |||
OFFSET(0,0) | |||
END 4 | |||
______________________________________________________________ | |||
</pre> | |||
Using the 'RESTOR' command without '1' the condition file will be restored without demagnetizing of the lenses. | |||
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