Specific Process Knowledge/Bonding/Fusion bonding: Difference between revisions
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*Place the chuck and graphite electrode in the chamber. | *Place the chuck and graphite electrode in the chamber. | ||
*Close the chamber. | *Close the chamber. | ||
*Turn the µm screw on top of the chamber to set the desired stack | *Turn the µm screw on top of the chamber to set the desired stack height. | ||