Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions

Revision as of 10:57, 15 July 2016 view source Tigre (talk \| contribs) DCH-Employees-701 2,257 edits →Optical pre-alignment of wafers ← Older edit		Revision as of 11:00, 15 July 2016 view source Tigre (talk \| contribs) DCH-Employees-701 2,257 edits →Optical pre-alignment of wafers Newer edit →
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	'''6.''' Save the alignment information (File/Save). The file should be saved under your name and date, eg ‘mettekjan312012.txt’, in the folder ‘C:\~~temp’~~. This file can be transferred to ~~the e-beam~~ computer ~~DCH1352~~ by ~~email or dropbox~~.		'''6.''' Save the alignment information (File/Save). The file should be saved under your name and date, eg ‘mettekjan312012.txt’, in the folder ‘C:\Alignment data’. This file can be transferred to your office computer by citrix remote.