Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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'''1.''' Carefully position the cassette face down on the optical aligner stage; make sure that the cassette is completely aligned with the stage before clamping the cassette to the stage. The hook of the cassette should turn away from yourself, i.e. towards D-3. | '''1.''' Carefully position the cassette face down on the optical aligner stage; make sure that the cassette is completely aligned with the stage before clamping the cassette to the stage. The hook of the cassette should turn away from yourself, i.e. towards D-3. | ||
'''2.''' Open the Pre-Alignment Microscope System (PAMS) tool and Kappa Image Base from the Desktop. In Kappa Image Base, click ‘Open/Close Control Dialog’ in ‘Camera’. Click on the screen-icon to open camera view and the ‘>>’-icon to open the control dialog. If no contact can be reached to the camera via Kappa Image Base, restart the computer | '''2.''' Open the Pre-Alignment Microscope System (PAMS) tool and Kappa Image Base from the Desktop. In Kappa Image Base, click ‘Open/Close Control Dialog’ in ‘Camera’. Click on the screen-icon to open camera view and the ‘>>’-icon to open the control dialog. If no contact can be reached to the camera via Kappa Image Base, restart the computer. | ||
'''3.''' Turn on the yellow light. Align the stage to the zero-marker, and press x and y on the sensor controller. This zeros the position of the software according to zero of the stage. Always zero the stage at maximum magnification. | '''3.''' Turn on the yellow light. Align the stage to the zero-marker, and press x and y on the sensor controller. This zeros the position of the software according to zero of the stage. Always zero the stage at maximum magnification. | ||