Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions

1. Carefully position the cassette face down on the optical aligner stage; make sure that the cassette is completely aligned with the stage before clamping the cassette to the stage. The hook of the cassette should turn away from yourself, i.e. towards the wall.

2. Open the Pre-Alignment Microscope System (PAMS) tool and Kappa Image Base from the Desktop. In Kappa Image Base, click ‘Open/Close Control Dialog’ in ‘Camera’. Click on the screen-icon to open camera view and the ‘>>’-icon to open the control dialog. If no contact can be reached to the camera via Kappa Image Base, restart the computer (login: cleanroom, password: Renrum12).

3. Turn on the yellow light. Align the stage to the zero-marker, and press x and y on the sensor controller. This zeros the position of the software according to zero of the stage. Always zero the stage at maximum magnification.

4. In PAMS, choose JBX-9300FS and correct wafer size and position in the workpiece window. Enter the P and Q mark design positions (i.e. L-edit coordinates).

5. Find the P mark at maximum magnification. Click ‘Get P’. Repeat the procedure with the Q mark. Calculate gain and rotation by clicking 'Calculate' and log the results in the Log-window by clicking 'Log result'. Switch off the yellow light after use.

6. Save the alignment information (File/Save). The file should be saved under your name and date, eg ‘mettekjan312012.txt’, in the folder ‘C:\temp’.  This file can be transferred to the e-beam computer DCH1352 by email or dropbox.

7. In the jdf-file, the theoretical (L-edit/CleWin) position of the P and Q marks should be defined. In the sdf-file the mark-detection should be set to semi-automatic 'S' (see section 7 in this manual and the separate sdf- and jdf-file preparation manual).