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Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions

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[[File:HowToMount.jpg|left|500px]]
[[File:HowToMount.jpg|left|500px]]
Wafer cassettes must be handled with great care and with an extra pair of clean gloves (to be found inside the e-beam room). Prevent any form of impact of the cassette and never touch the delicate parts of the cassette, i.e. the reference plane, reference marks or grounding pins. Take care that the cassette is not scratched against the metal table, always keep cleanroom side-sealed lintfree tissues between cassette and table.




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*'''Always wear''' face-mask and a new pair of gloves
*'''Always wear''' face-mask and a new pair of gloves
*'''Never put cassettes directly on the table; use lint-free cleanroom tissues'''
*'''Never touch''' the reference planes, i.e. the six polished areas on the front side of the cassette
*'''Never touch''' the reference planes, i.e. the six polished areas on the front side of the cassette
*'''Never lift''' the cassette in the hook
*'''Never lift''' the cassette in the hook
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