Specific Process Knowledge/Lithography/ZEP520A: Difference between revisions
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This is a standard positive resist from ZEON. The resist is out of stock from the manufacturer and also very expensive; DTU Danchip | This is a standard positive resist from ZEON. The resist is out of stock from the manufacturer and also very expensive; DTU Danchip has thus stopped buying this resist. As of August 2016 we have around 0.5L left. Use CSAR instead. | ||
Contact lithography@danchip.dtu.dk if you wish to use this resist. | Contact lithography@danchip.dtu.dk if you wish to use this resist. | ||
== Process Flow == | == Process Flow == | ||