Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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* Click on the arrow above 'CPU disk', and open a console | * Click on the arrow above 'CPU disk', and open a console | ||
* In the console, type 'ebxmenu' | * In the console, type 'ebxmenu' | ||
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= Transfer of cassettes between autoloader and e-beam writer = | = Transfer of cassettes between autoloader and e-beam writer = | ||