Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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#Close the door and click CLOSE | #Close the door and click CLOSE | ||
#Set the autoloader back in REMOTE | #Set the autoloader back in REMOTE | ||
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= Transfer of cassettes between autoloader and e-beam writer = | = Transfer of cassettes between autoloader and e-beam writer = | ||