Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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7. In the jdf-file, the theoretical (L-edit/CleWin) position of the P and Q marks should be defined. In the sdf-file the mark-detection should be set to semi-automatic 'S' (see section 7 in this manual and the separate sdf- and jdf-file preparation manual). | 7. In the jdf-file, the theoretical (L-edit/CleWin) position of the P and Q marks should be defined. In the sdf-file the mark-detection should be set to semi-automatic 'S' (see section 7 in this manual and the separate sdf- and jdf-file preparation manual). | ||
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= Load and unload of cassettes into/from autoloader = | = Load and unload of cassettes into/from autoloader = | ||