Specific Process Knowledge/Lithography/EBeamLithography/JBX9500Manual: Difference between revisions
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The original JEOL manual for the e-beam writer JEOL JBX-9500FS is located on the O-drive: O:\CleanroomDrive\_Equipment\E-beam | The original JEOL manual for the e-beam writer JEOL JBX-9500FS is located on the O-drive: O:\CleanroomDrive\_Equipment\E-beam | ||
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== Techical Specification == | == Techical Specification == | ||