Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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100 nm lines in ~900 nm thick CSAR has been developed with AR-600-546 (standard CSAR developer) at room temperature. | 100 nm lines in ~900 nm thick CSAR has been developed with AR-600-546 (standard CSAR developer) at room temperature. | ||
[[File:CSAR 6200.18 developed with AR600546.png|400px]] | [[File:CSAR 6200.18 developed with AR600546.png|right|400px]] | ||
{|border="1" cellspacing="0" cellpadding="3" style="text-align:right;" style="width: 75%" | {|border="1" cellspacing="0" cellpadding="3" style="text-align:right;" style="width: 75%" | ||