Specific Process Knowledge/Lithography/CSAR: Difference between revisions
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== Contrast Curves == | == Contrast Curves == | ||
=== CSAR 6200.09 === | |||
100 nm lines in both ~70 nm and ~188 nm thick CSAR has been developed with AR-600-546 (standard CSAR developer) at room temperature. | 100 nm lines in both ~70 nm and ~188 nm thick CSAR has been developed with AR-600-546 (standard CSAR developer) at room temperature. | ||
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[[File:ContrastCurvesCSAR_March2016_log.png|600px]] | [[File:ContrastCurvesCSAR_March2016_log.png|600px]] | ||
=== CSAR 6200.18 === | |||