Specific Process Knowledge/Lithography: Difference between revisions
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*[http://www.cnf.cornell.edu/cnf_spietoc.html Handbook of Microlithography, Micromachining, and Microfabrication, Chapter 2: E-beam Lithography] | *[http://www.cnf.cornell.edu/cnf_spietoc.html Handbook of Microlithography, Micromachining, and Microfabrication, Chapter 2: E-beam Lithography] | ||
*[http://onlinelibrary.wiley.com/doi/10.1002/9781118557662.ch3/summary Stefan Landis,Lithography, Chapter 3: E-beam Lithography] | *[http://onlinelibrary.wiley.com/doi/10.1002/9781118557662.ch3/summary Stefan Landis,Lithography, Chapter 3: E-beam Lithography] | ||
'''<big>July TPT lecture</big>''' | |||
*[[:File:Litho Tool Package - Part1-5 at home v1_0.pptx|Slides for studying at home]] ([[:File:Litho Tool Package - Part1-5 at home v1_0.pdf|pdf-version]]) | |||
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'''<big>Deep-UV Exposure</big>''' | '''<big>Deep-UV Exposure</big>''' | ||
*[[Specific_Process_Knowledge/Lithography/DUVStepperLithography|Deep-UV Stepper Lithography]] | *[[Specific_Process_Knowledge/Lithography/DUVStepperLithography|Deep-UV Stepper Lithography]] | ||
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